Rutherford Backscattering Spectrometry (RBS) is a powerful ion beam analysis technique in frequent use within materials science. The recent emergence of targets incorporating complex features such as ultra-scaled diffusion barriers and isotopically-enriched films has started to push the limits of the technique, necessitating the expanded use of systems with a higher energy resolution. The increased cost and complexity of these systems based on already well-established schemes may present a barrier to their more widespread adoption. Here, we present an RBS detection system specifically designed for simple integration into existing nuclear probe infrastructure, but with a considerably higher energy resolution than a standard passivated planar detector. We employ a modified silicon p-i-n photodiode integrated within an optimised in-vacuum preamplifier to achieve a relative energy resolution of 3 x 10(-3) with 2.2 MeV He+ ions. In a glancing angle geometry, this corresponds to a depth resolution of similar to 1.5 nm and a mass resolution of <1 u from light elements up to Cu. We demonstrate the use of this detector to measure the thermal diffusion of near-surface As implants in a Si substrate, important for the formation of ultra-shallow junctions; and the residual Si-29 concentration in an isotopically enriched Si-28 specimen, a promising platform for quantum computation.
The 2023 Boyer Lecture series is called 'The Atomic Revolution' and is presented by Professor Michelle Simmons AO, a pioneer in atomic electronics and global leader in quantum computing.READ
CQC2T Director Professor Michelle Simmons AO and Chief Investigator Professor Yuerui (Larry) Lui were recognised in the prestigious 2023 Prime Minister’s award ceremony held at Parliament House last nREAD
An international team of researchers has developed a technology that has shattered a world record in continuous variable quantum teleportation. This latest technology offers a viable pathway enroute tREAD
Fault-tolerant, error-corrected quantum computation is commonly acknowledged to be crucial to the realisation of large-scale quantum algorithms that could lead to extremely impactful scientific or comREAD
Engineers show that a jellybean-shaped quantum dot creates more breathing space in a microchip packed with qubits.READ